In this study the effect of processing temperature on the diffusion processes at ion nitriding of titanium alloy Ti-6Al-4V in a non-self-maintained high-current and glow discharge was investigated. The temperature of ion nitriding was varied from 450 to 600 °C. The treatment was performed in a gas mixture of argon and nitrogen at various ratios. It was found that ion nitriding in a non-self-maintained high-current and glow discharge at a temperature of 450 °C was increased the surface microhardness of Ti-6Al-4V titanium alloy. It has been established that the thickness of diffusion layers was 10, 13 and 17 µm at ion nitriding in glow discharge at temperatures of 450, 500 and 600 °C, respectively. And the thickness of diffusion layers was 10, 13 and 17 µm at ion nitriding in a non-self-maintained high-current discharge at temperatures of 450, 500 and 600 °C, respectively.