NOVEL AUTOMATION FOR SEM & DUALBEAM WITH PYTHON SCRIPTING

Daniel Phifer
Materials Science, Thermo Fisher Scientific, Eindhoven, The Netherlands

Repetitive electron microscopy tasks that could be automated are often not due to the microscope/instrument manufacturer not allowing control of these systems. Manufacturers chose the most commercially viable routines to sell as dedicated software such as "Auto Slice and View" or "Auto TEM" and these applications are quite successful for high volume applications. Unfortunately, many applications that are routine and repetitive are extremely specific to real research needs and there is a real desire for control and automation solution for SEM and DualBeamâ„¢ systems to meet this need. Python appears to be the premier open source scripting language for scientific research so Thermo Fisher Scientific has developed a Python interface library, "AutoScript", to interfaces the SEM and DualBeam platforms with modern operating systems to enable simple automation routines to be constructed which can do a variety of routine tasks..

The AutoScript API allows automation routines to be constructed which can do a variety of non-routine tasks as well and decision trees can be integrated for unattended operation. Combining control of most all microscope functions including setting and reading values, calling auto functions, saving images and storing values with other existing open source Python scripts can be supplemented with image matching, data graphing, automated response and feedback loops to create novel performance. Many nice examples of custom scripts have already been created that adjust settings with a feedback loop, extract and graph in situ data, and perform image capture automatically at specified positions. The availability of so many Python based routines in the open source environment allows various components to be integrated/combined for specific purposes. With the ability to control both the SEM and FIB columns, GIS, Manipulator, and other accessories, the AutoScript interface allows writing advanced automation for most tasks. Python libraries exist for image matching, data display and data export that complete the suite of capabilities needed for custom automation of systems on Windows 7 and higher.

Daniel Phifer
Daniel Phifer
Thermo Fisher Scientific








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